Wafer Cassette Detection Under Water

To sense the presence of a wafer cassette on a conveyor submerged in water

Description

Silicon wafers are transported from one process to another in cassette on a conveyor that is totally submerged in de-ionized water. A D10 sensor has teflon-encapsulated opposed-mode fibers that are located on either side of the conveyor. When the cassette is present, the opposed beam is broken.

D10 Series

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